PECVD

Principle and applications

In a PECVD (Plasma Enhanced Chemical Vapour Deposition) process, thin layers are deposited from the gas phase. 

PECVD processes can be found in the semiconductor industry and applications with similar requirements (e.g. flat panel displays, photovoltaics). 

Here, also a parallel plate reactor is used. 

KIVOS 350 RIE+PECVD

KIVOS 500 RIE+PECVD

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