Microwave

Microwave

COMPACT-MW

Features

  • Compact systems, minimized footprint
  • High plasma densities for short process times
  • Optimized homogeneity by plasma-array with 2-dimensional gas inlet system
  • High loading capacity

PIKNOS 30 MW

General data

Dimensions (WxDxH): 1.0 x 0.8 x 1.8 m
Chamber volume: 30 l
Supply voltage: 3/N/PE AC 400/230V
Gas supply: Up to 4 mass flow controllers with a flow rate of up to 500 sccm each


Microwave-supply

quency: 2.45 GHz
Max. power: 2 kW, pulsed 4 kW

Sterilization and Barrier Coating

Aurion has developed a process for the sterilization and barrier coating of hollow objects (like e.g. PET-bottles). Please contact us to discuss the implementation of this technology for your application

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