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Thinking Ahead
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Plasma Systems
Overview
Atmospheric Pressure Sputtering
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RIE
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Sputtering Systems
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Overview
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Skip navigation
Start
About AURION
AURION
Thinking Ahead
Aurion Team
Plasma processes
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Publications
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AURION project cycle
Plasma Systems
Overview
Atmospheric Pressure Sputtering
The KIVOS concept
RIE
PECVD
Microwave
Sputtering Systems
Cluster and Inline Systems
Components
Overview
Impendance Matching Networks
Data sheets
RF systems for particle accelerators
Services
Contact
Contact & Route
Contactform
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