Thinking Ahead combined know-how and expertise

At AURION we bring together know-how and expertise from different disciplines, most important prerequisite to develop processes as well as to realize components and complete systems for specific, individual solutions. Furthermore we constantly develop new, cost saving and environmentally friendly technologies and help optimizing existing processes to increase efficiency.


Atmospheric pressure plasma sources, RIE, microwave downstream plasma, PVD (Sputtering) and PECVD systems as well as combinations thereof, including cluster tools.


Radio frequency components like Automatic Impedance Matching Networks (Matchboxes), Switches, Filters, Power Splitters, Phase Shifters etc.


Aurion´s team offers its extensive expertise in the areas of plasma technology and radio frequency technology for consulting services and training classes.

Wir sind Mitglied von

Meet us at workshops and trade shows

  1. PLASMA GERMANY, Karlsruhe

    Location: Karlsruhe

    PLASMA GERMANY takes place in Karlsruhe on 09th and 10th April 2019.

  2. IPAC 2019

    Location: Melbourne

    IPAC is the main international event for the worldwide accelerator community and industry. Attendees will be presented with cutting-edge accelerator research and development results and gain the latest insights into accelerator facilities across the globe.

  3. PT19

    Location: Cottbus

    PT19 in Cottbus

  4. V2019

    Location: Dresden

    Keynote Lecture to Atomic Layer Deposition from
    Tuomo Suntola, Millenium Technology Prize 2018

    Presentations to “Atomic Layer Deposition”
    Workshop 5: October 9 – October 10, 2019

    Industrial Exhibition for Surface Technologies and adjacent Branches

    Industrial Evening & V-Dinner

    Information to Industrial International Funding

AURION Anlagentechnik GmbH

Am Sandborn 14
63500 Seligenstadt

+49(0) 6182 96 28 -0

+49(0) 6182 96 28 -16

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