+49(0) 6182 96 28 -0
Thinking Ahead combined know-how and expertise
At AURION we bring together know-how and expertise from different disciplines, most important prerequisite to develop processes as well as to realize components and complete systems for specific, individual solutions. Furthermore we constantly develop new, cost saving and environmentally friendly technologies and help optimizing existing processes to increase efficiency.
Learn more about the AURION project cycle and its potential.
PLASMA SYSTEMS
Atmospheric pressure plasma sources, RIE, microwave downstream plasma, PVD (Sputtering) and PECVD systems as well as combinations thereof, including cluster and inline tools.
COMPONENTS
Radio frequency components like Automatic Impedance Matching Networks (Matchboxes), Switches, Filters, Power Splitters, Phase Shifters etc.
We are members of
Meet us at workshops and trade shows
PLASMA GERMANY, Herzogenaurach
Location: HerzogenaurachPLASMA GERMANY meets in Herzogenaurach on 12th and 13th of April, 2022.
IPAC 2022, Bangkok (Thailand)
Location: Bangkok (Thailand)The 13th International Particle Accelerator Conference is the main international event for the worldwide accelerator community and industry. Attendees will be presented with cutting-edge accelerator research and development results and gain the latest insights into accelerator facilities across the globe.
PSE 2022, Erfurt
Location: ErfurtThe 18th International Conference on Plasma Surface Engineering.
AURION Anlagentechnik GmbH
Am Sandborn 14
63500 Seligenstadt
+49(0) 6182 96 28 -16
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